5 31.1 44.9 52.5 67.7 71.1 (411)B 22.7 30.1 44.9 54.5 69.3 76.8 (511)B 22.2 31.2 44.1 53.6 66.0 76.7 (711)B 22.6 33 47.4 56 70.8 77.3 (811)B 22.8 30.5 44.5 52.7 65.5 74.6 (911)B 22.3 30.5 44.5 52.7 65.5 74.6 Lateral diameter [nm] (211)B 86.5 106.5 142.4 186.2 248.8 276.8 (411)B
89.8 108.1 168.6 214.2 253.2 298.7 (511)B 85.1 106.5 149.9 189.2 258.2 323.2 (711)B 87.1 108.9 150.4 222 299 314.5 (811)B 82.2 105.3 173.7 187.2 292.8 320 (911)B 81.3 106.4 155.8 213.2 267 304.2 Density [×108 cm-2] (211)B 320 100 39 16 6.1 4.2 (411)B 320 108 36 15 6.9 3.3 (511)B 320 110 selleck chemical 36 15 6.6 3.1 (711)B 320 96 28 13 3.9 2.8 (811)B 304 108 39 16 4.9 2.9 (911)B 320 112 33 15 5.3 2.8 R q [nm] (211)B 6.22 11.63 15.79 20.76 24.37 19.95 (411)B 6.64 10.63 16.51 21.48 25.54 21.94 (511)B 5.88 11.21 15.32 21.34 21.71 21.14 (711)B 6.97 11.90 EPZ6438 15.50 21.07 21.51 18.31 (811)B 6.68 10.80 17.10 21.32 22.13 20.09 (911)B 6.80 10.74 16.44 20.50 24.62 18.30 AH, average height; LD, lateral diameter; AD, average density; RMS, root-mean-square
roughness (R q); S, surface indices; DA, deposition amount. Conclusions In this study, the evolution of the self-assembled Au droplets was successfully demonstrated on various GaAs (n11)B, where n is 2, 4, 5, 7, 8, and 9. With the systematic variation of the DAs from 2 to 12 nm at a fixed annealing temperature of 550°C, the Au droplet growth progressed based on the Volmer-Weber growth mode and the results were methodically investigated with the AFM and SEM images, line profiles, and Fourier filter transform power spectra. In general, along with the gradually increased DAs, the self-assembled Au droplets showed the increased size of the AH and LD, while the AD showed a gradual decreasing tendency. More specifically, both the AH and LD were increased approximately many three times while the density was varied around 2 orders of magnitude during the variation of the DAs from 2 to 12 nm. The size and density behavior of the self-assembled Au droplets was discussed based on the theories of kinetics and thermal
dynamics. Au droplets exhibited minor index dependency, and this can be likely due to the strong dependency of adatom diffusion on the substrate temperate. Acknowledgements This work was supported by the National check details research Foundation (NRF) of Korea (nos.